The U.S. Department of Commerce has signed a non-binding letter of intent to invest up to $150 million in xLight, a Palo Alto–based startup developing free-electron lasers (FEL) for next-generation extreme ultraviolet (EUV) lithography, giving the government an equity stake in the company. The agreement marks the first award under the 2022 CHIPS and Science Act by the current administration and was announced as the government seeks to rebuild domestic semiconductor manufacturing capabilities. xLight — which counts former Intel CEO Pat Gelsinger as executive chairman — plans to build a full-scale FEL prototype at the Albany NanoTech Complex, aiming to produce its first silicon wafers using the new light source by around 2028. Government backing could help xLight compete with incumbents like ASML and shift control of key lithography technology back to U.S. soil.
Key Takeaways
– The $150 million investment gives the U.S. government a direct equity stake in xLight — likely making it the company’s largest shareholder — signaling a renewed federal commitment to reshoring advanced chip-making capabilities.
– xLight’s free-electron laser technology aims to challenge ASML’s dominance in EUV lithography by offering a more energy-efficient and domestically controlled light source, with a target of producing commercially viable wafers by 2028.
– While the agreement is non-binding, the endorsement from the government could unlock additional private investment and accelerate development timelines, though success still depends on proving that FEL-based lithography can scale for mass semiconductor production.
In-Depth
The announcement that the U.S. government plans to invest up to $150 million in xLight marks a significant pivot in America’s semiconductor policy — one that blends strategic industrial planning with venture-style investing. Under the new arrangement, xLight will receive federal incentives provided through the CHIPS and Science Act, in exchange for equity — granting the government ownership in the startup. This is the first such equity investment under the current administration, and it reflects a broader intent to reassert U.S. leadership in advanced chip manufacturing. The fact that the deal is structured as equity — not a grant — implies long-term commitment and expectation of returns, both technological and financial.
xLight, founded in 2021, is taking aim at one of the most challenging elements in modern semiconductor fabrication: the light source used in EUV lithography machines. EUV lithography — the process that etches microscopic chip designs onto silicon wafers — currently depends on highly specialized, energy-intensive lasers. For years, the Dutch firm ASML has held near-monopoly control over the global supply of such machines. xLight intends to change that by building free-electron lasers (FELs) powered by particle accelerators, capable of delivering coherent, high-intensity extreme ultraviolet radiation. By using FEL technology, xLight claims it can significantly reduce electrical consumption and potentially scale throughput — a critical advantage as chipmakers race to meet growing demand driven by AI, high-performance computing, and next-generation devices.
Leadership matters here. With Pat Gelsinger — former CEO of Intel — as executive chairman, xLight brings considerable industry gravitas. Gelsinger’s reputation and connections likely helped the startup attract early-stage venture investors (as seen in its $40 million Series B round in mid-2025), and they now bring similar clout to government negotiations. The federal funding provides both a strong runway for developing a full-scale FEL prototype and a soft anchor to attract follow-on private capital, reducing financial risk for other investors. The plan is to build the first FEL system at the Albany NanoTech Complex, part of a broader national effort to create domestic EUV capability and anchor advanced lithography infrastructure within U.S. borders.
The strategic implications are significant. By supporting xLight, the government is betting on a future where the United States can reclaim a core component of the semiconductor supply chain — not just manufacturing capacity, but the critical laser technology at its heart. That is a big deal given the recent supply-chain fragility shown during global chip shortages, trade tensions, and geopolitical friction surrounding key manufacturing hubs in East Asia. If xLight succeeds, the U.S. could reduce its reliance on foreign suppliers and gain more control over chip supply — a potential edge in national security and technological sovereignty.
However, there are serious challenges. The deal is still based on a non-binding letter of intent (LOI), meaning final terms are not yet settled. Even with funding secured, the technical hurdles of designing, building, and integrating a free-electron laser into existing or new lithography tools are enormous. EUV lithography is among the most complex manufacturing processes on the planet — tolerances are microscopic, and the systems involved are highly specialized. Scaling FEL to commercial volume production, ensuring reliability and consistency, and integrating with semiconductor fabs will require more than just capital; it requires flawless execution and engineering breakthroughs. Investors and observers are right to temper expectations — this technology isn’t guaranteed to work at scale, and if it fails, the government’s equity could underperform, while private investors might balk at associating with a government-owned stake.
Moreover, some critics argue that government equity investments distort markets by picking winners. By stepping in as a shareholder, the government might discourage other private investors who avoid companies tied to regulatory or political interests. That accusation of “state capitalism” echoes past concerns about government picking winners and losers rather than letting the market operate freely. Even proponents concede this is a trade-off: national strategic interests are being prioritized over pure market competition.
Still, the xLight funding marks a bold moment. Amid mounting global competition for semiconductor leadership, the U.S. is staking part of its future on a risky, high-reward bet — that a homegrown start-up can dethrone foreign dominance in one of microchip manufacturing’s most critical technologies. If it works, xLight could reshape not just the semiconductor industry but U.S. economic and technological standing. If it doesn’t, this will stand as a cautionary tale about the limits of federal intervention in high-tech markets.
In the meantime, xLight will proceed with technology development at the Albany facility, lean on its experienced leadership team, and try to deliver on its promise of revolutionizing chipmaking. The sequence of events over the next 12–24 months — whether they secure additional funding, make engineering breakthroughs, or face technical roadblocks — could be decisive not just for the company, but for the future of U.S.-based semiconductor manufacturing.

